Title:
PROBE SYSTEMS CONFIGURED TO TEST A DEVICE UNDER TEST AND METHODS OF OPERATING THE PROBE SYSTEMS
Document Type and Number:
WIPO Patent Application WO/2022/164489
Kind Code:
A3
Abstract:
Probe systems configured to test a device under test and methods of operating the probe systems are disclosed herein. The probe systems include an electromagnetically shielded enclosure, which defines an enclosed volume, and a temperature-controlled chuck, which defines a support surface configured to support a substrate that includes the DUT. The probe systems also include a probe assembly and an optical microscope. The probe systems further include an electromagnet and an electronically controlled positioning assembly. The electronically controlled positioning assembly includes a two-dimensional positioning stage, which is configured to selectively position a positioned assembly along a first two- dimensional positioning axis and also along a second two-dimensional positioning axis. The electronically controlled positioning assembly also includes a first one-dimensional positioning stage that operatively attaches the optical microscope to the positioned assembly and a second one-dimensional positioning stage that operatively attaches the electromagnet to the positioning assembly.
More Like This:
Inventors:
SCHINDLER MARTIN (US)
KREISSIG STEFAN (US)
KIEL TORSTEN (US)
KREISSIG STEFAN (US)
KIEL TORSTEN (US)
Application Number:
PCT/US2021/056673
Publication Date:
November 10, 2022
Filing Date:
October 26, 2021
Export Citation:
Assignee:
FORMFACTOR INC (US)
International Classes:
G01R31/28; G01R1/06; G01R31/308; G01R35/00
Foreign References:
| US7586608B1 | 2009-09-08 | |||
| US20200025823A1 | 2020-01-23 | |||
| US20070096763A1 | 2007-05-03 |
Attorney, Agent or Firm:
D'ASCENZO, David S. (US)
Download PDF: