PROBE UNIT AND SHAPE-MEASURING DEVICE

WIPO Patent Application WO/2015/093459

A1

　Provided are a probe unit and a shape-measuring device which are compact, have a simple configuration, and are capable of accurate measurement, even of objects to be measured that readily deform. This probe unit, together with a sensor, is attached a frame of a shape-measuring device, and is used to measure the shape of an object to be measured, wherein the probe unit has: a stylus for contacting an object to be measured; a probe structure linked to the stylus, the probe structure having an orientation detection plate that extends in a direction different from the direction of extension of the stylus and faces the sensor; a holding part for holding the probe structure in a relatively rotatable manner with respect to the frame; and a moving mechanism for moving the probe structure in the direction of extension of the stylus, with respect to the frame, the position of the orientation detection plate being detected by the sensor to calculate the orientation of the probe structure in a state in which the stylus has abutted the object to be measured, whereby the shape of the object to be measured is measured.

JP6049785	Measuring probe
JP5996546	The contact process probe provided with the piezoelectric sensor and the heat insulation part

SOWA SEIJI (JP)
WATANABE KATSUSHI (JP)
YOSHIDA SHUNICHIRO (JP)
HASHIMOTO NAOKI (JP)

PCT/JP2014/083203

June 25, 2015

December 16, 2014

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KONICA MINOLTA INC (JP)

G01B5/012; G01B21/00

JPS572405U	1982-01-07
JP2007101491A	2007-04-19
JP2010281729A	2010-12-16
US20070051005A1	2007-03-08
JPH0275509U	1990-06-08
JPH03122308U	1991-12-13
JPH0526601A	1993-02-02
JPH1073429A	1998-03-17
JP2010286475A	2010-12-24

TAMURA Keijiro et al. (JP)
Keijichiro Tamura (JP)

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