Title:
PROBE
Document Type and Number:
WIPO Patent Application WO/2023/139953
Kind Code:
A1
Abstract:
This probe comprises a main body portion and a spring portion having a larger electrical resistivity and modulus of elasticity than the main body portion, the main body portion and the spring portion being connected in parallel. The main body portion has a configuration in which a tip end portion, a trunk portion which deforms elastically, and a base end portion are linked in the stated order. The spring portion has a configuration in which a first joint portion joined to the tip end portion, an elastic deformation portion that deforms elastically, and a second joint portion joined to the base end portion are linked in the stated order.
Inventors:
SHUTO AKIHIRO (JP)
Application Number:
PCT/JP2022/044964
Publication Date:
July 27, 2023
Filing Date:
December 06, 2022
Export Citation:
Assignee:
NIHON MICRONICS KK (JP)
International Classes:
G01R1/067
Foreign References:
| KR101799309B1 | 2017-12-20 | |||
| JP2006511804A | 2006-04-06 | |||
| KR20180095315A | 2018-08-27 | |||
| JP2016524169A | 2016-08-12 | |||
| JPH05226043A | 1993-09-03 | |||
| JP2014510283A | 2014-04-24 | |||
| JP2018515752A | 2018-06-14 | |||
| JP2018091870A | 2018-06-14 | |||
| JP2010071760A | 2010-04-02 |
Attorney, Agent or Firm:
MIYOSHI Hidekazu et al. (JP)
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