Title:
PROCESS FOR PRODUCING ONIUM SALT DERIVATIVE AND NOVEL ONIUM SALT DERIVATIVE
Document Type and Number:
WIPO Patent Application WO/2001/040167
Kind Code:
A1
Abstract:
A production process by which an onium salt derivative useful as, e.g., an acid generator in resists of the chemical amplification type can be synthesized in high yield. The process comprises reacting an onium salt derivative having a halogen anion or carboxylate anion with a sulfonic ester derivative or phosphoric ester derivative. Thus, an onium sulfonate derivative or onium phosphate derivative is obtained in high yield.
Inventors:
TOMITA KYOICHI (JP)
ISHII SHINJI (JP)
ISHII SHINJI (JP)
Application Number:
PCT/JP2000/008488
Publication Date:
June 07, 2001
Filing Date:
December 01, 2000
Export Citation:
Assignee:
TOYO GOSEI KOGYO KK (JP)
TOMITA KYOICHI (JP)
ISHII SHINJI (JP)
TOMITA KYOICHI (JP)
ISHII SHINJI (JP)
International Classes:
C07C25/02; C07C25/18; C07C303/32; C07C305/04; C07C309/04; C07C309/06; C07C309/24; C07C309/25; C07C309/29; C07C309/30; C07C309/33; C07C309/39; C07C381/12; C07F9/09; C07F9/40; C07C305/06; C07C309/23; C07C309/43; (IPC1-7): C07C305/04; C07C309/29; C07C309/30; C07C309/33; C07C309/39; C07C309/04; C07C309/06; C07C309/25; C07C25/18; C07C381/12; C07F9/09
Foreign References:
| US5824824A | 1998-10-20 | |||
| EP0104143A1 | 1984-03-28 | |||
| JPH10330353A | 1998-12-15 | |||
| JPH1138623A | 1999-02-12 | |||
| EP0115466A2 | 1984-08-08 | |||
| JPH10133364A | 1998-05-22 |
Other References:
STANG P.J. ET AL.: "Acetylenic esters. Preparation and characterization of alkynyl dialkyl phosphates, RC=COPO(OR')2", J. AM. CHEM. SOC., vol. 111, no. 6, 1989, pages 2225 - 2230, XP002937403
UMEMOTO T. ET AL.: "Syntheses and properties of (perfluoroalkyl)phenyliodonium triflates (FITS reagents) and analogues", J. FLUORINE CHEM., vol. 31, no. 1, 1986, pages 37 - 56, XP002937404
See also references of EP 1164127A4
UMEMOTO T. ET AL.: "Syntheses and properties of (perfluoroalkyl)phenyliodonium triflates (FITS reagents) and analogues", J. FLUORINE CHEM., vol. 31, no. 1, 1986, pages 37 - 56, XP002937404
See also references of EP 1164127A4
Attorney, Agent or Firm:
Kurihara, Hiroyuki (Ebisu 1-chome Shibuya-ku Tokyo, JP)
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