Title:
PROCESS FOR PRODUCING SUBSTRATE FOR THIN-FILM PHOTOELECTRIC TRANSDUCER, AND THIN-FILM PHOTOELECTRIC TRANSDUCER
Document Type and Number:
WIPO Patent Application WO/2006/098185
Kind Code:
A1
Abstract:
This invention provides a process for producing a substrate for a thin-film photoelectric transducer, which can provide a thin-film photoelectric transducer which, even when a transparent electrically conductive film composed mainly of zinc oxide having a large optical confinement effect and having a relatively large haze is used, does not cause a lowering in open end voltage and a curve factor. The process for producing a substrate for a thin-film photoelectric transducer is characterized by comprising etching a transparent electrically conductive film, provided on a transparent insulating substrate, composed mainly of zinc oxide and having a haze of not less than 5% with an acid or alkali solution. The output characteristics of the thin-film photoelectric transducer can be improved by, in the texture structure of the film surface, removing a steep protrusion part causative of a lowering in Voc and FF by etching with an acid or alkali.
Inventors:
MEGURO TOMOMI (JP)
YAMAMOTO KENJI (JP)
YAMAMOTO KENJI (JP)
Application Number:
PCT/JP2006/304306
Publication Date:
September 21, 2006
Filing Date:
March 07, 2006
Export Citation:
Assignee:
KANEKA CORP (JP)
MEGURO TOMOMI (JP)
YAMAMOTO KENJI (JP)
MEGURO TOMOMI (JP)
YAMAMOTO KENJI (JP)
International Classes:
H01L31/0224; H01L31/0236
Foreign References:
| JP2003282902A | 2003-10-03 | |||
| JPH10335684A | 1998-12-18 | |||
| JP2000232234A | 2000-08-22 |
Other References:
RECH B. ET AL.: "New materials and deposition techniques for highly efficient silicon thin film solar cells", SOLAR ENERGY MATERIALS AND SOLAR CELLS, vol. 74, no. 1 TO 4, October 2002 (2002-10-01), pages 439 - 447, XP004376973
HAYAKAWA T. ET AL.: "Microcrystalline Silicon Thin-Film Solar Cells", SHARP TECHNICAL JOURNAL, no. 83, August 2002 (2002-08-01), pages 45 - 48, XP003005871
HAYAKAWA T. ET AL.: "Microcrystalline Silicon Thin-Film Solar Cells", SHARP TECHNICAL JOURNAL, no. 83, August 2002 (2002-08-01), pages 45 - 48, XP003005871
Attorney, Agent or Firm:
KANEKA CORPORATION (Kita-ku Osaka-shi, Osaka 88, JP)
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