Title:
PROCESS FOR PRODUCTION OF FLUORINE−CONTAINING NORBORNENE DERIVATIVES
Document Type and Number:
WIPO Patent Application WO/2003/006413
Kind Code:
A1
Abstract:
Novel norbornene derivatives bearing fluorinated ketone or fluorinated alcohol moieties attached directly to norbornene skeleton, which are useful as material of chemically amplified photoresists for F2 laser lithography having excellent transparency and improved dry etching resistance&semi fluorine −containing polymers produced by using the derivatives as comonomer&semi and chemically amplified photoresist compositions each comprising a fluorine−containing polymer described above, a photoacid generator, and a solvent.
Inventors:
ARAKI TAKAYUKI (JP)
ISHIKAWA TAKUJI (JP)
KUME TAKUJI (JP)
YAMAMOTO AKINORI (JP)
ISHIKAWA TAKUJI (JP)
KUME TAKUJI (JP)
YAMAMOTO AKINORI (JP)
Application Number:
PCT/JP2002/007112
Publication Date:
January 23, 2003
Filing Date:
July 12, 2002
Export Citation:
Assignee:
DAIKIN IND LTD (JP)
ARAKI TAKAYUKI (JP)
ISHIKAWA TAKUJI (JP)
KUME TAKUJI (JP)
YAMAMOTO AKINORI (JP)
ARAKI TAKAYUKI (JP)
ISHIKAWA TAKUJI (JP)
KUME TAKUJI (JP)
YAMAMOTO AKINORI (JP)
International Classes:
C07C33/44; C07C43/313; C07C45/45; C07C49/567; C07C61/28; C07C69/96; G03F7/004; G03F7/038; G03F7/039; (IPC1-7): C07C45/68; C07C49/567; C07C33/44; C07C29/36; C07C43/172; C08F32/00; G03F7/039
Domestic Patent References:
| WO2002036533A1 | 2002-05-10 |
Foreign References:
| JP2001296662A | 2001-10-26 | |||
| US20010038969A1 | 2001-11-08 | |||
| EP0157262A1 | 1985-10-09 |
Other References:
PIRKLE W.H., RINALDI P.L.: "Use of liquid-crystal-induced circular dichroism for determination of absolute configuration of alcohols and oxaziridines", J. ORG. CHEM., vol. 45, 1980, pages 1379 - 1382, XP002957666
KRASOVSKY A.L. ET AL.: "Diels-Alder reactions of beta-trifluoroacetylvinylsulfones", TETRAHEDRON, vol. 57, no. 1, 1 January 2001 (2001-01-01), pages 201 - 209, XP004227566
See also references of EP 1415974A4
KRASOVSKY A.L. ET AL.: "Diels-Alder reactions of beta-trifluoroacetylvinylsulfones", TETRAHEDRON, vol. 57, no. 1, 1 January 2001 (2001-01-01), pages 201 - 209, XP004227566
See also references of EP 1415974A4
Attorney, Agent or Firm:
Asahina, Sohta (2-22 Tanimachi 2-chome, Chuo-k, Osaka-shi Osaka, JP)
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