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Title:
PROCESSING APPARATUS AND PROCESSED ARTICLE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/195931
Kind Code:
A1
Abstract:
The present invention automatically replaces a holding plate for holding a workpiece and is provided with: a processing mechanism 4 that performs processing on a sealed board W; a plate reception part 24 that receives a holding plate M1 for holding the sealed board W; a holding base part M2 on which the holding plate M1 can be detachably mounted and which holds the sealed board W using the holding plate M1; and a plate conveying mechanism 25 that conveys the holding plate M1 between the plate reception part 24 and the holding base part M2, wherein the plate conveying mechanism 25 conveys the holding plate M1 detached from the holding base part M2 to the plate reception part 24 and conveys the holding plate M1 at the plate reception part 24 to the holding base part M2.

Inventors:
FUKAI MOTOKI (JP)
KATAOKA SHOICHI (JP)
HORI SATOKO (JP)
SAKAUE YUYA (JP)
YAMAMOTO YUKO (JP)
YOSHIOKA SHO (JP)
IMAI ICHIRO (JP)
Application Number:
PCT/JP2021/035885
Publication Date:
September 22, 2022
Filing Date:
September 29, 2021
Export Citation:
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Assignee:
TOWA CORP (JP)
International Classes:
B24B41/06; B23Q7/04; B24B27/06; B24B49/08; C03B33/03; H01L21/301; H01L21/677; H01L21/683; H05K3/00
Domestic Patent References:
WO2010137072A12010-12-02
Foreign References:
KR102138003B12020-07-27
JP2019051645A2019-04-04
JP2015188024A2015-10-29
JPH06135546A1994-05-17
JP2019202353A2019-11-28
JP2014138011A2014-07-28
JP2015033729A2015-02-19
JP2003266263A2003-09-24
KR102146784B12020-08-21
KR102167500B12020-10-19
JP2019016700A2019-01-31
JP2016054256A2016-04-14
JP2010118376A2010-05-27
JP2008511164A2008-04-10
Attorney, Agent or Firm:
NISHIMURA, Ryuhei (JP)
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