Title:
PROCESSING CONDITION MANAGEMENT SYSTEM AND PRODUCTION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2016/080268
Kind Code:
A1
Abstract:
A processing condition management system (20) used in a production system (1) including a FICS (11) and a plurality of processing devices (40), wherein the processing condition management system (20) is provided with a storage unit (30), a communication unit (21), and a processing-recipe-providing unit (29). The storage unit (30) stores, for each of a plurality of processing devices (40) of the same type, a processing recipe used when the processing device (40) performs processing on a substrate to be processed. The communication unit (21) transmits and receives information pertaining to the processing recipe to and from the FICS (11). The processing-recipe-providing unit (29), upon being requested for a processing recipe by each of the processing devices (40), reads the requested processing recipe from the storage unit (30) and provides the processing recipe to the processing device (40) making the request.
Inventors:
ASAKAWA TERUO (JP)
MURATA NAOKO (JP)
MASHIRO SUPIKA (JP)
MURATA NAOKO (JP)
MASHIRO SUPIKA (JP)
Application Number:
PCT/JP2015/081786
Publication Date:
May 26, 2016
Filing Date:
November 11, 2015
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/02; G05B19/418; G06Q50/04
Domestic Patent References:
| WO2013011920A1 | 2013-01-24 |
Foreign References:
| JP2006024742A | 2006-01-26 | |||
| JP2003006006A | 2003-01-10 | |||
| JP2012209593A | 2012-10-25 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
Patent business corporation Sakai international patent firm (JP)
Patent business corporation Sakai international patent firm (JP)
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