Title:
PROCESSING DEVICE, PROCESSING METHOD, AND COMPUTER STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2020/012951
Kind Code:
A1
Abstract:
This processing device comprises: a holding unit which holds a substrate therein; a grinding unit which grinds a processing surface of the substrate held in the holding unit; a conveyance unit which conveys the substrate to the holding unit; and a control unit which controls the holding unit, the grinding unit, and the conveyance unit. The control unit controls the holding unit, the grinding unit, and the conveyance unit such that initialization of the holding unit, initialization of the grinding unit, and initialization of the conveyance unit are performed after the processing device is shut down during operation and is restarted, the substrate in the holding unit is detected, the necessity or unnecessity of grinding of the detected substrate by the grinding unit is designated, and the processing surface of the substrate the grinding of which has been designated as being necessary is ground by the grinding unit.
Inventors:
KANEKO TOMOHIRO (JP)
MATSUMOTO TAKESHI (JP)
FUKUNAGA NOBUTAKA (JP)
YARIMITSU MASAKAZU (JP)
RYU HIDEJIRO (JP)
MATSUMOTO TAKESHI (JP)
FUKUNAGA NOBUTAKA (JP)
YARIMITSU MASAKAZU (JP)
RYU HIDEJIRO (JP)
Application Number:
PCT/JP2019/025153
Publication Date:
January 16, 2020
Filing Date:
June 25, 2019
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/304; B24B7/04; B24B49/10; B24B51/00
Foreign References:
| JP2011218472A | 2011-11-04 | |||
| JP2004319961A | 2004-11-11 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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