Title:
PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/035722
Kind Code:
A1
Abstract:
This processing device (100) is provided with: a first wire section (112) and a second wire section (122) that are disposed in a manner so that a member (GB) to be processed bridges across in a plan view, and that support the member (GB) to be processed from beneath; a driving unit (vertical mechanism) (113) that moves the first wire section (112) in the vertical direction relative to the second wire section (122); and a displacement mechanism (displacement mechanism sections (132), (134)) that moves the first wire section (112) in the horizontal direction relative to the second wire section (122).
Inventors:
SANDA KAZUTO (JP)
Application Number:
PCT/JP2011/005038
Publication Date:
March 22, 2012
Filing Date:
September 08, 2011
Export Citation:
Assignee:
FURUKAWA CO LTD (JP)
SANDA KAZUTO (JP)
SANDA KAZUTO (JP)
International Classes:
B65G49/06; F26B5/04; H01L21/677; H01L21/683; G02F1/13; G02F1/1333; G02F1/1345; H05K3/00
Foreign References:
| JP2000150333A | 2000-05-30 | |||
| JPH1076211A | 1998-03-24 | |||
| JP2010149953A | 2010-07-08 | |||
| JP2006061755A | 2006-03-09 |
Attorney, Agent or Firm:
HAYAMI, SHINJI (JP)
Shinji Hayami (JP)
Shinji Hayami (JP)
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Claims: