Title:
PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/159735
Kind Code:
A1
Abstract:
A processing device for processing a substrate, said processing device having: a substrate holding unit for holding a substrate; a processing unit for processing a processing surface of a substrate held in the substrate holding unit; and a display unit for displaying a schematic view of the substrate, and for displaying, in association with the schematic view, processing information obtained during processing of the substrate. The display unit has a condition input screen for inputting processing conditions, and the processing conditions input via the condition input screen are displayed in association with the schematic view.
Inventors:
FUKUNAGA NOBUTAKA (JP)
YARIMITSU MASAKAZU (JP)
SUZUKI AKIFUMI (JP)
KATAOKA MITSUSHI (JP)
YARIMITSU MASAKAZU (JP)
SUZUKI AKIFUMI (JP)
KATAOKA MITSUSHI (JP)
Application Number:
PCT/JP2019/003814
Publication Date:
August 22, 2019
Filing Date:
February 04, 2019
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G05B19/409; B24B49/04; H01L21/304
Foreign References:
| JP2009206206A | 2009-09-10 | |||
| JP2017140657A | 2017-08-17 | |||
| JP2002126975A | 2002-05-08 | |||
| JP2010251524A | 2010-11-04 | |||
| JP2015016529A | 2015-01-29 | |||
| JP2016015042A | 2016-01-28 | |||
| JP2000326223A | 2000-11-28 | |||
| JP2013056388A | 2013-03-28 | |||
| JP2011218450A | 2011-11-04 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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