Title:
PROCESSING MACHINE AND PRODUCTION METHOD FOR OBJECT SUBJECT TO PROCESSING
Document Type and Number:
WIPO Patent Application WO/2023/042602
Kind Code:
A1
Abstract:
The present invention provides a processing machine in which a machine body drives at least one of a workpiece and a tool to process the workpiece using the tool. A processing chamber houses the workpiece, the tool, and a nozzle while isolating the workpiece, the tool, and the nozzle from at least a part of the machine body. An internal temperature sensor measures the temperature of an atmosphere in the processing chamber. An external temperature sensor measures the temperature of an atmosphere around the processing machine. A temperature adjustment unit raises the temperature of a processing liquid fed to the nozzle when the temperature measured by the internal temperature sensor is lower than the temperature measured by the external temperature sensor. Additionally or alternatively, the temperature adjustment unit lowers the temperature of the processing liquid fed to the nozzle when the temperature measured by the internal temperature sensor is higher than the temperature measured by the external temperature sensor.
Inventors:
AKIYAMA TAKANOBU (JP)
Application Number:
PCT/JP2022/031311
Publication Date:
March 23, 2023
Filing Date:
August 19, 2022
Export Citation:
Assignee:
SHIBAURA MACHINE CO LTD (JP)
International Classes:
B23Q11/14; B23Q11/10; B24B49/14; B24B55/02
Foreign References:
| JP2002331441A | 2002-11-19 | |||
| JP2010167504A | 2010-08-05 |
Attorney, Agent or Firm:
IIJIMA, Yasuhiro (JP)
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