Title:
PROCESSING SYSTEM, INCLINATION ADJUSTMENT METHOD, AND COMPUTER STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2022/034808
Kind Code:
A1
Abstract:
Provided is a processing system for an object to be processed, comprising: a holding part which holds the object to be processed on an upper surface; a holding base which holds the holding part on the upper surface; a processing unit which processes the object to be processed held by the holding part; an inclination adjusting part that adjusts the relative inclination between the holding part or the holding base and the processing unit; and an information display unit which displays information on the holding part, the holding base, the processing unit, and the inclination adjusting part, wherein the information display unit displays, on the same screen, an input unit which inputs relative distance information between the holding part or the holding base and the processing unit, and an instruction unit which starts the operation of the inclination adjusting part.
Inventors:
FUKUNAGA NOBUTAKA (JP)
YARIMITSU MASAKAZU (JP)
YARIMITSU MASAKAZU (JP)
Application Number:
PCT/JP2021/028333
Publication Date:
February 17, 2022
Filing Date:
July 30, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
B24B41/06; B23Q17/00; B24B49/12; H01L21/304
Domestic Patent References:
| WO2018235619A1 | 2018-12-27 |
Foreign References:
| JP2013141725A | 2013-07-22 | |||
| JP2003053652A | 2003-02-26 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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