PROCESSING SYSTEM, MEASUREMENT PROBE, SHAPE MEASURING DEVICE, AND PROGRAM

Title:

PROCESSING SYSTEM, MEASUREMENT PROBE, SHAPE MEASURING DEVICE, AND PROGRAM

Document Type and Number:

WIPO Patent Application WO/2019/130381

Kind Code:

A1

Abstract:

This processing system is equipped with: a control unit which generates position information pertaining to the position of a measurement part when measuring a workpiece, and outputs the generated position information and a generation timing signal indicating the timing at which the position information was generated; an acquisition unit which acquires the output position information and generation timing signal; an acquisition interval calculation unit which calculates a statistical value indicating the intervals of the acquisition timings for a plurality of the generation timing signals acquired by the acquisition unit; an estimation unit which, on the basis of the statistical value calculated by the acquisition interval calculation unit, estimates the timing at which the position information was generated; and a shape calculation unit which calculates the shape of the workpiece on the basis of measurement information, the position information, and the timing estimated by the estimation unit.

Inventors:

YAMADA TOMOAKI (JP)
NISHIKAWA SHIZUO (JP)
MIYAMOTO SATOSHI (JP)
MORISHITA JUNICHI (JP)

Application Number:

PCT/JP2017/046371

Publication Date:

July 04, 2019

Filing Date:

December 25, 2017

Export Citation:

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Assignee:

NIKON CORP (JP)
DMG MORI CO LTD (JP)

International Classes:

B23Q17/20; G01B21/00

Foreign References:

JP2010194660A	2010-09-09
JP2017173160A	2017-09-28
JP2008157646A	2008-07-10
JP2007178226A	2007-07-12
JP2012225701A	2012-11-15

Other References: