Title:
PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2023/037541
Kind Code:
A1
Abstract:
This processing system comprises a first processing device for carrying out addition processing in a first processing region by radiating a first energy beam, a second processing device for carrying out removal processing in a second processing region by radiating a second energy beam, first and second mounting devices on which the addition processing and the removal processing are carried out, a position changing device for moving the first and second mounting devices relatively between the first and second processing regions, and first and second light-receiving devices arranged respectively on the first and second mounting devices, wherein the first and second light-receiving devices are able to receive light from at least one of the first and second energy beams, acquire information about the position of the first mounting device from a light reception result from the first light-receiving device, and acquire information about the position of the second mounting device from a light reception result from the second light-receiving device.
Inventors:
EGAMI SHIGEKI (JP)
Application Number:
PCT/JP2021/033523
Publication Date:
March 16, 2023
Filing Date:
September 13, 2021
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
B23K26/34; B23K26/342; B29C64/153; B29C64/188; B29C64/227; B33Y30/00
Domestic Patent References:
| WO2020090962A1 | 2020-05-07 | |||
| WO2016152475A1 | 2016-09-29 |
Foreign References:
| CN112549523A | 2021-03-26 | |||
| JP2020125509A | 2020-08-20 | |||
| JP2018537304A | 2018-12-20 | |||
| JP2017036506A | 2017-02-16 |
Attorney, Agent or Firm:
EGAMI, Tatsuo (JP)
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