Title:
PRODUCTION METHOD FOR SEMICONDUCTOR PACKAGES
Document Type and Number:
WIPO Patent Application WO/2021/192341
Kind Code:
A1
Abstract:
According to the present disclosure, a production method for semiconductor packages includes (A) a step for forming a temporary fixing material layer on a first surface (a circuit exposure surface) of a panel member that includes a plurality of semiconductor packages, (B) a step for pasting an adhesive film onto a second surface of the panel member, (C) a step for dicing the panel member and the temporary fixing material layer that are on the adhesive film into a plurality of semiconductor packages that have a temporary fixing material piece, (D) a step for arranging the plurality of semiconductor packages that have a temporary fixing material piece on a support carrier such that the interval between adjacent semiconductor packages that have a temporary fixing material piece is at least 0.1 mm, (E) a step for removing the adhesive film from the support carrier and the plurality of semiconductor packages that have a temporary fixing material piece, and (F) a step for forming a functional layer on the surface of the plurality of semiconductor packages that have a temporary fixing material piece.
Inventors:
FUKUZUMI SHIZU (JP)
SUZUKI NAOYA (JP)
SUZUKI NAOYA (JP)
Application Number:
PCT/JP2020/028926
Publication Date:
September 30, 2021
Filing Date:
July 28, 2020
Export Citation:
Assignee:
SHOWA DENKO MATERIALS CO LTD (JP)
International Classes:
H01L23/00; H01L21/56; H05K9/00
Domestic Patent References:
WO2018216621A1 | 2018-11-29 |
Foreign References:
JP2019009371A | 2019-01-17 | |||
JP2000164682A | 2000-06-16 | |||
JP2015195398A | 2015-11-05 | |||
US8084300B1 | 2011-12-27 | |||
JP2017208529A | 2017-11-24 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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