Title:
PROJECTION OPTICAL SYSTEM
Document Type and Number:
WIPO Patent Application WO2006069795
Kind Code:
A3
Abstract:
A projection optical system comprises a plurality of lenses disposed along an optical axis of the projection optical system; wherein the plurality of lenses is dividable into four non-overlapping groups of lenses, such that a total refractive power of each group of lenses is one of a negative refractive power and a positive refractive power; and wherein a refractive power of each lens of the fourth group of lenses is equal to or greater than 0. A lens of the third group of lenses which is disposed directly adjacent to a lens of the fourth group of lenses may have a concave surface facing towards the second object.
Inventors:
DODOC AURELIAN (DE)
ULRICH WILHELM (DE)
ULRICH WILHELM (DE)
Application Number:
PCT/EP2005/014148
Publication Date:
August 17, 2006
Filing Date:
December 30, 2005
Export Citation:
Assignee:
ZEISS CARL SMT AG (DE)
DODOC AURELIAN (DE)
ULRICH WILHELM (DE)
DODOC AURELIAN (DE)
ULRICH WILHELM (DE)
International Classes:
G03F7/20; G02B13/14
Domestic Patent References:
| WO2004097911A1 | 2004-11-11 | |||
| WO2005050321A1 | 2005-06-02 |
Foreign References:
| EP1245984A2 | 2002-10-02 | |||
| US20030174408A1 | 2003-09-18 | |||
| US6459534B1 | 2002-10-01 | |||
| EP1235092A2 | 2002-08-28 | |||
| US20040027653A1 | 2004-02-12 | |||
| US20010024330A1 | 2001-09-27 |
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