Title:
PROTECTIVE FILM FORMING FILM, PROTECTIVE FILM FORMING SHEET AND WORK PRODUCT MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2015/145807
Kind Code:
A1
Abstract:
Provided is a protective film forming film (1), wherein the product of the breaking stress (MPa), measured at a measurement temperature of 0°C, and the breaking strain (unit: %), measured at a measurement temperature of 0°C, is 1 MPa∙%-250 MPa∙% inclusive for at least one of the protective film forming film (1) and a protective film formed from the protective film forming film (1). This protective film forming film (1) enables the protective film forming film (1) or the protective film formed from the protective film forming film (1) to be appropriately divided in an expanding step that is performed on a work piece when the work piece is divided to obtain a processed work piece.
Inventors:
SAIKI NAOYA (JP)
INAO YOUICHI (JP)
YAMAMOTO DAISUKE (JP)
YONEYAMA HIROYUKI (JP)
INAO YOUICHI (JP)
YAMAMOTO DAISUKE (JP)
YONEYAMA HIROYUKI (JP)
Application Number:
PCT/JP2014/073265
Publication Date:
October 01, 2015
Filing Date:
September 03, 2014
Export Citation:
Assignee:
LINTEC CORP (JP)
International Classes:
H01L21/301; B23K26/53; B32B27/00; C08J7/043; C08J7/044; C08J7/05; C09J7/02
Domestic Patent References:
| WO2013172328A1 | 2013-11-21 | |||
| WO2011089664A1 | 2011-07-28 |
Foreign References:
| JP2011046963A | 2011-03-10 | |||
| JP2006203133A | 2006-08-03 |
Attorney, Agent or Firm:
SHIGA, Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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