Title:
PULSE DRIVE OF RESONANT MEMS DEVICES
Document Type and Number:
WIPO Patent Application WO2005001903
Kind Code:
A3
Abstract:
System and method for establishing and maintaining resonant oscillations of a torsional hinged device such as a pivotally hinged mirror. The system and methods comprise a permanent magnet mounted to the pivoting mirror that interacts with an electromagnetic coil. The magnetic coil is periodically connected and disconnected from a DC power supply in response to a series of drive pulses having a timing and duration such that the magnetic forces generated by the interaction of the permanent magnet and the electromagnetic coil maintains resonant oscillations of the device.
Inventors:
TURNER ARTHUR M (US)
DEWA ANDREW S (US)
HEATON MARK W (US)
RODEN PHILIP A (US)
SIMPSON CARTER B (US)
DEWA ANDREW S (US)
HEATON MARK W (US)
RODEN PHILIP A (US)
SIMPSON CARTER B (US)
Application Number:
PCT/US2004/019637
Publication Date:
July 14, 2005
Filing Date:
June 16, 2004
Export Citation:
Assignee:
TEXAS INSTRUMENTS INC (US)
TURNER ARTHUR M (US)
DEWA ANDREW S (US)
HEATON MARK W (US)
RODEN PHILIP A (US)
SIMPSON CARTER B (US)
TURNER ARTHUR M (US)
DEWA ANDREW S (US)
HEATON MARK W (US)
RODEN PHILIP A (US)
SIMPSON CARTER B (US)
International Classes:
G02B26/08; H02K33/16; H02P25/02; (IPC1-7): H02K33/00; H02K35/00; G02B26/08
Foreign References:
| US6538799B2 | 2003-03-25 | |||
| US6809434B1 | 2004-10-26 |
Other References:
See also references of EP 1645022A4
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