Title:
PULSE WIDTH EXPANDING APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/171516
Kind Code:
A1
Abstract:
A pulse width expanding apparatus according to one aspect of the present disclosure comprises a polarizing beam splitter and a transfer optical system. The transfer optical system comprises: a quarter-wave mirror pair including: a first quarter-wave mirror that reflects a pulsed laser beam at a quarter-wavelength phase shift and a second quarter-wave mirror that reflects the pulsed laser beam reflected by the first quarter-wave mirror at a quarter-wavelength phase shift; and a reflective mirror pair disposed in an optical path before and after the quarter-wave mirror pair, or in an optical path between the quarter-wave mirror pair. The transfer optical system transfers, to the optical path between the quarter-wave mirror pair at the same magnification as a first transferred image, an image of the input pulsed laser beam in the polarizing beam splitter, and transfers the first transferred image to the polarizing beam splitter at the same magnification as a second transferred image.
Inventors:
MIYAMOTO HIROTAKA (JP)
WAKABAYASHI OSAMU (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
PCT/JP2020/008159
Publication Date:
September 02, 2021
Filing Date:
February 27, 2020
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; H01S3/10; H01S3/225
Domestic Patent References:
| WO2018020564A1 | 2018-02-01 |
Foreign References:
| JP2008505495A | 2008-02-21 | |||
| JP2011054737A | 2011-03-17 | |||
| US5260954A | 1993-11-09 | |||
| JP2008071866A | 2008-03-27 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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