Title:
PUMP DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/145576
Kind Code:
A1
Abstract:
[Problem]
To provide a pump device with which power consumption can be further reduced.
[Solution]
A pump device (1) according to one embodiment of the present invention is equipped with: a drive motor (M); a first pump unit (11) used for evacuation and having a first pump chamber and a first piston (21v); and a second pump unit (12) used for pressurization and having a second pump chamber and a second piston (21c). The phase of the second piston (21c) is advanced with respect to the first piston (21v), with a rotational phase difference Ø of more than 0° and less than 80°.
Inventors:
OSAKA TAISUKE (JP)
TANABE YUSAKU (JP)
CHOUNO MOTOYASU (JP)
ITOYAMA RYUJI (JP)
TANABE YUSAKU (JP)
CHOUNO MOTOYASU (JP)
ITOYAMA RYUJI (JP)
Application Number:
PCT/JP2013/001436
Publication Date:
October 03, 2013
Filing Date:
March 07, 2013
Export Citation:
Assignee:
ULVAC KIKO INC (JP)
International Classes:
F04B41/06; F04B27/02
Foreign References:
| JPH07310651A | 1995-11-28 | |||
| JP2008190517A | 2008-08-21 | |||
| JPH07310651A | 1995-11-28 |
Other References:
See also references of EP 2832998A4
Attorney, Agent or Firm:
OMORI, JUNICHI (JP)
Omori Junichi (JP)
Omori Junichi (JP)
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