Title:
PURIFICATION METHOD, AND PURIFICATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/175096
Kind Code:
A1
Abstract:
Provided is a novel sublimation purification method. Also provided is a novel sublimation purification device. In the purification method, there is used a purification device having a purification unit for purifying a substance by vaporizing, a temperature adjustment means, a gas-supplying means, and a gas-discharging means. In the purification method: the purification unit interior is set to a first pressure using the gas-discharging means; a gradient is imparted to the temperature of the purification unit using the temperature adjustment means and the substance is purified, whereupon the pressure inside the purification unit is set to a second pressure using the gas-supplying means; and the purification unit is cooled using the temperature adjustment means. The second pressure is higher than the first pressure, the second pressure being atmospheric pressure or greater.
Inventors:
KAWAKAMI SACHIKO (JP)
KITANO YASUSHI (JP)
ABE KANTA (JP)
KITANO YASUSHI (JP)
ABE KANTA (JP)
Application Number:
PCT/IB2017/051809
Publication Date:
October 12, 2017
Filing Date:
March 30, 2017
Export Citation:
Assignee:
SEMICONDUCTOR ENERGY LAB (JP)
International Classes:
B01D7/00; B01D1/00
Foreign References:
| JP2014008483A | 2014-01-20 | |||
| JPH11267401A | 1999-10-05 | |||
| JP2005313069A | 2005-11-10 | |||
| JP2015160182A | 2015-09-07 | |||
| US20140191422A1 | 2014-07-10 |
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