Title:
PURIFICATION METHOD FOR ELECTRONIC GRADE BORON TRICHLORIDE
Document Type and Number:
WIPO Patent Application WO/2024/060352
Kind Code:
A1
Abstract:
The present invention relates to the field of electronic specialty gases, and in particular to a purification method for electronic grade boron trichloride. The method comprises the following steps: (S.1) filling an adsorber with an adsorption composition; (S.2) carrying out negative pumping treatment on the adsorber, removing air in the adsorber, and then introducing a high purity boron trichloride gas; and (S.3) introducing a boron trichloride feed gas into the adsorber, enabling the boron trichloride feed gas to come into contact with the adsorption composition, and collecting the gas flowing out of the adsorber to obtain an electronic grade boron trichloride gas. The present invention can effectively eliminate the coordination effect formed between hydrogen chloride impurities and boron trichloride, thereby improving the adsorption and purification effects on boron trichloride; moreover, an excellent adsorption effect on an impurity gas can be achieved by means of the adsorption composition in the present invention, and the concentration of the impurity gas in boron trichloride subjected to simple adsorption treatment can be decreased to a ppb level.
Inventors:
ZHAO YI (CN)
ZHAO YINFENG (CN)
LIU YING (CN)
BI CONGZHI (CN)
YU YING (CN)
ZHAO YINFENG (CN)
LIU YING (CN)
BI CONGZHI (CN)
YU YING (CN)
Application Number:
PCT/CN2022/127323
Publication Date:
March 28, 2024
Filing Date:
October 25, 2022
Export Citation:
Assignee:
DALIAN CREDITCHEM ELECTRONIC MATERICAL CO LTD (CN)
International Classes:
B01J20/22; B01D53/02; B01J20/20; B01J20/30; B01J20/32; C01B35/06
Domestic Patent References:
| WO2022040072A1 | 2022-02-24 |
Foreign References:
| CN114870804A | 2022-08-09 | |||
| CN107651651A | 2018-02-02 | |||
| JPH10265216A | 1998-10-06 |
Attorney, Agent or Firm:
ZHEJIANG KG IP LAW FIRM (CN)
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