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Title:
PVD DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/220839
Kind Code:
A1
Abstract:
This PVD device is provided with a chamber, multiple stages, a first target-holding part, a power supply mechanism, and a shield. The multiple stages are disposed inside the chamber and are each configured such that at least one substrate can be mounted on the upper surface thereof. The first target-holding part is exposed to an internal space of the chamber and is capable of holding a target that is provided at least singly on one stage. The power supply mechanism supplies electric power to the targets via the first target-holding part. The shield is disposed inside the chamber, with a portion thereof being placed between a first stage and a second stage of the multiple stages and between a first treatment space above the first stage and a second treatment space above the second stage.

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Inventors:
SEINO TAKUYA (JP)
KODASHIMA YASUSHI (JP)
WATANABE NAOKI (JP)
TOSHIMA HIROYUKI (JP)
SHINADA MASATO (JP)
MIYASHITA TETSUYA (JP)
Application Number:
PCT/JP2021/015661
Publication Date:
November 04, 2021
Filing Date:
April 16, 2021
Export Citation:
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Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
C23C14/34; C23C14/35
Domestic Patent References:
WO2008050618A12008-05-02
Foreign References:
JP2005228872A2005-08-25
JPS6383261A1988-04-13
JP2017133065A2017-08-03
JPS49114585A1974-11-01
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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