Title:
QUANTITATIVE ANALYSIS METHOD, QUANTITATIVE ANALYSIS PROGRAM, AND FLUORESCENCE X-RAY ANALYSIS DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/161631
Kind Code:
A1
Abstract:
Provided are a quantitative analysis method, a quantitative analysis program, and a fluorescent X-ray analysis device capable of performing highly accurate quantitative analysis in consideration of the influence of the geometry effect. The quantitative analysis method comprises: a step for acquiring a representative composition set as a representative of the content of each analytical component; a step for acquiring a plurality of comparative compositions in which the content of the analytical component of the representative composition is changed by a predetermined content of each component; a detection intensity calculation step for using the FP method to calculate the detection intensity representing the intensity of fluorescent X-rays detected under the influence of the geometry effect, for a virtual sample having a preset thickness and represented by a representative composition and a comparative composition; and a step for calculating a matrix correction coefficient for each analytical component, on the basis of the detection intensity, wherein αj is calculated by using the calibration curve formula including the detection intensity Ii of a component i, Wi represents the mass fraction of the component i, Wj represents the mass fraction of a coexisting component j, constants a, b and c, and αj represents the matrix correction coefficient for the coexisting component j.
Inventors:
KATAOKA YOSHIYUKI (JP)
KUSAKABE YASUSHI (JP)
KUSAKABE YASUSHI (JP)
Application Number:
PCT/JP2020/045322
Publication Date:
August 19, 2021
Filing Date:
December 04, 2020
Export Citation:
Assignee:
RIGAKU DENKI CO LTD (JP)
International Classes:
G01N23/223
Foreign References:
| JPH1082749A | 1998-03-31 | |||
| JP2006292399A | 2006-10-26 | |||
| JP2002340823A | 2002-11-27 | |||
| JP2011089953A | 2011-05-06 | |||
| JPH09269305A | 1997-10-14 | |||
| CN107290376A | 2017-10-24 |
Other References:
HISAYUKI KOHNOMAMORU MURATAYOSHIYUKI KATAOKATOMOYA ARAI: "Advances in X-Ray Chemical Analysis,Japan", AGNE GIJUTSU CENTER INC., vol. 19, 1988, pages 307 - 328
See also references of EP 4105649A4
See also references of EP 4105649A4
Attorney, Agent or Firm:
HARUKA PATENT & TRADEMARK ATTORNEYS (JP)
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