Title:
QUANTUM CHIP NONDESTRUCTIVE TESTING PROBE DEVICE AND PROBE STATION
Document Type and Number:
WIPO Patent Application WO/2023/109772
Kind Code:
A1
Abstract:
Disclosed in the present application are a quantum chip nondestructive testing probe device and a quantum chip nondestructive testing probe station. The probe device comprises a probe and a probe control mechanism, wherein the probe control mechanism comprises a displacement adjusting assembly; and the displacement adjusting assembly comprises a Z-axis displacement rough adjustment table and a Z-axis displacement fine adjustment table. The probe station comprises the probe device, a supporting structure and a chip displacement table, wherein the chip displacement table is arranged on the supporting structure. The probe device comprises the probe and the probe control mechanism, wherein the probe control mechanism is mounted on the supporting structure and comprises the Z-axis displacement fine adjustment table; and the probe is arranged on the Z-axis displacement fine adjustment table, and the Z-axis displacement fine adjustment table precisely adjusts the probe in the Z-axis direction, such that the probe is lowered to a quantum chip to be tested. According to the present application, by means of cooperative use of the device, the probe can be moved conveniently and precisely, and can thus make precise contact with the quantum chip, thereby achieving precise measurement.
Inventors:
ZHANG HUI (CN)
LIU YAO (CN)
ZHANG FU (CN)
JIN XIANSHENG (CN)
ZHAO YONGJIE (CN)
LIU YAO (CN)
ZHANG FU (CN)
JIN XIANSHENG (CN)
ZHAO YONGJIE (CN)
Application Number:
PCT/CN2022/138438
Publication Date:
June 22, 2023
Filing Date:
December 12, 2022
Export Citation:
Assignee:
ORIGIN QUANTUM COMPUTING TECH HEFEI CO LTD (CN)
International Classes:
G01R27/02; G01R1/073
Foreign References:
| CN218412704U | 2023-01-31 | |||
| CN218213195U | 2023-01-03 | |||
| CN209927979U | 2020-01-10 | |||
| CN110118920A | 2019-08-13 | |||
| JP2002323425A | 2002-11-08 |
Attorney, Agent or Firm:
SHANGHAI HEHUAQIHE INTELLECTUAL PROPERTY AGENCY CO., LTD (CN)
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