Title:
QUANTUM NANODOTS, TWO-DIMENSIONAL QUANTUM NANODOT ARRAY AND SEMICONDUCTOR DEVICE USING SAME AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2012/173162
Kind Code:
A1
Abstract:
Presented are quantum nanodots, a two-dimensional quantum nanodot array, and a semiconductor device using the same and a manufacturing method therefor. Quantum nanodots (3) are comprised of semiconductors, and the outer diameter of the quantum nanodots in the horizontal direction is no more than twice the radius of the bore of excitors in the semiconductor. A two-dimensional quantum nanodot array (1) is configured so that the quantum nanodots (3) are disposed uniformly in two-dimensions with the gap between the nanodots (3) being greater than 1 nm. An intermediate layer (6) that comprises a semiconductor or an insulator and that fills the area between quantum nanodot arrays (10) may also be included. Since the quantum nanodots are highly oriented and very dense, the quantum confinement effect is high. As a result, direct transition-type luminescence occurs in the quantum nanodots (3), which are comprised of Si. Also, in the two-dimensional quantum nanodot array including the intermediate layer (6), the optical properties and transport properties can be controlled.
Inventors:
SAMUKAWA SEIJI (JP)
Application Number:
PCT/JP2012/065172
Publication Date:
December 20, 2012
Filing Date:
June 13, 2012
Export Citation:
Assignee:
UNIV TOHOKU (JP)
SAMUKAWA SEIJI (JP)
SAMUKAWA SEIJI (JP)
International Classes:
H01L31/04; B82Y20/00; H01S5/343
Domestic Patent References:
| WO2010137297A1 | 2010-12-02 |
Foreign References:
| JP2005200425A | 2005-07-28 | |||
| JP2002223016A | 2002-08-09 | |||
| JP2009290025A | 2009-12-10 | |||
| JP2009290026A | 2009-12-10 | |||
| JP2006049817A | 2006-02-16 |
Other References:
CONIBEER ET AL.: "Silicon quantum dot nanostructures for tandem photovoltaic cells", THIN SOLID FILMS, vol. 516, no. 20, 2008, pages 6748 - 6756, XP022777848
SEIJI SAMUKAWA: "Bio Template Kyokugen Kako ni yoru Ryoshi Kozo no Jitsugen", DAI 55 KAI EXTENDED ABSTRACTS, JAPAN SOCIETY OF APPLIED PHYSICS AND RELATED SOCIETIES, 27 March 2008 (2008-03-27), pages 112, XP008172957
TOMOHIRO KUBOTA ET AL.: "Ferritin Core o Mochiita Nano Kozo no Sakusei (4) -Ryoshi Dot Kozo no Sakusei", DAI 52 KAI EXTENDED ABSTRACTS, JAPAN SOCIETY OF APPLIED PHYSICS AND RELATED SOCIETIES, vol. 3, 29 March 2005 (2005-03-29), pages 1514, XP008172958
SEIJI SAMUKAWA: "Bio-nano Process and Ultimate Top-down Etching", PROCEEDINGS OF THE FOURTH INTERNATIONAL SYMPOSIUMU ON ADVANCED FLUID INFORMATION AND THE FIRST INTERNATIOAL SYMPOSIUM ON TRANSDISCIPLINARY FLUID INTEGRATION, vol. 4, 2 October 2006 (2006-10-02), pages 63 - 65, XP008173129
GEN YAMAZAKI ET AL.: "Nano-etching Using Nanodots Mask Fabricated by Bio-nano-process", JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, vol. 16, no. 3, 15 July 2003 (2003-07-15), pages 439 - 444, XP055139199
See also references of EP 2720275A4
SEIJI SAMUKAWA: "Bio Template Kyokugen Kako ni yoru Ryoshi Kozo no Jitsugen", DAI 55 KAI EXTENDED ABSTRACTS, JAPAN SOCIETY OF APPLIED PHYSICS AND RELATED SOCIETIES, 27 March 2008 (2008-03-27), pages 112, XP008172957
TOMOHIRO KUBOTA ET AL.: "Ferritin Core o Mochiita Nano Kozo no Sakusei (4) -Ryoshi Dot Kozo no Sakusei", DAI 52 KAI EXTENDED ABSTRACTS, JAPAN SOCIETY OF APPLIED PHYSICS AND RELATED SOCIETIES, vol. 3, 29 March 2005 (2005-03-29), pages 1514, XP008172958
SEIJI SAMUKAWA: "Bio-nano Process and Ultimate Top-down Etching", PROCEEDINGS OF THE FOURTH INTERNATIONAL SYMPOSIUMU ON ADVANCED FLUID INFORMATION AND THE FIRST INTERNATIOAL SYMPOSIUM ON TRANSDISCIPLINARY FLUID INTEGRATION, vol. 4, 2 October 2006 (2006-10-02), pages 63 - 65, XP008173129
GEN YAMAZAKI ET AL.: "Nano-etching Using Nanodots Mask Fabricated by Bio-nano-process", JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, vol. 16, no. 3, 15 July 2003 (2003-07-15), pages 439 - 444, XP055139199
See also references of EP 2720275A4
Attorney, Agent or Firm:
HIRAYAMA KAZUYUKI (JP)
Kazuyuki Hirayama (JP)
Kazuyuki Hirayama (JP)
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Claims: