Title:
QUARTZ CRYSTAL RESONATOR AND PRODUCTION METHOD THEREFOR, OSCILLATOR, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/061514
Kind Code:
A1
Abstract:
A quartz crystal resonator and a production method therefor, an oscillator, and an electronic device, relating to the field of quartz crystal oscillators and capable of reducing the size of quartz crystal resonators. The quartz crystal resonator comprises: a carrier (1); a first metal layer (21), a quartz layer (3), and a second metal layer (22) sequentially provided on the surface of the carrier (1); and a cavity (10) provided on the side of the quartz layer (3) away from the second metal layer (21), at least part of the first metal layer (21) being provided between the cavity (10) and the quartz layer (3). In this case, the use of a MEMS production process can meet the production requirements of a miniature quartz crystal resonator, thereby achieving the packaging of the quartz crystal resonator and a chip.
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Inventors:
LI WEI (CN)
YAO YANLONG (CN)
XU HUILONG (CN)
YAO YANLONG (CN)
XU HUILONG (CN)
Application Number:
PCT/CN2020/116832
Publication Date:
March 31, 2022
Filing Date:
September 22, 2020
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
H03H9/19
Foreign References:
| US20110187227A1 | 2011-08-04 | |||
| CN202906852U | 2013-04-24 | |||
| CN110474616A | 2019-11-19 |
Attorney, Agent or Firm:
BEIJING RUN ZEHENG INTELLECTUAL PROPERTY LAW FIRM (CN)
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