Title:
QUARTZ GLASS BLANK AND METHOD FOR PRODUCING SAID BLANK
Document Type and Number:
WIPO Patent Application WO2005114328
Kind Code:
A3
Abstract:
The invention relates to a quartz glass blank for an optical component for transmitting radiation with a wavelength of 15 nm and shorter. Said blank consists of a highly pure quartz glass, doped with titanium and/or fluorine, which is characterised by an extremely high degree of homogeneity. The homogeneity relates to the following characteristics: a) micro-inhomogeneities caused by a local variance of the TiO
Inventors:
ENGLISCH WOLFGANG (DE)
TAKKE RALF (DE)
KUEHN BODO (DE)
UEBBING BRUNO (DE)
KOEPPLER RAINER (DE)
TAKKE RALF (DE)
KUEHN BODO (DE)
UEBBING BRUNO (DE)
KOEPPLER RAINER (DE)
Application Number:
PCT/EP2005/005059
Publication Date:
April 13, 2006
Filing Date:
May 11, 2005
Export Citation:
Assignee:
HERAEUS QUARZGLAS (DE)
SHINETSU QUARTZ PROD (JP)
ENGLISCH WOLFGANG (DE)
TAKKE RALF (DE)
KUEHN BODO (DE)
UEBBING BRUNO (DE)
KOEPPLER RAINER (DE)
SHINETSU QUARTZ PROD (JP)
ENGLISCH WOLFGANG (DE)
TAKKE RALF (DE)
KUEHN BODO (DE)
UEBBING BRUNO (DE)
KOEPPLER RAINER (DE)
International Classes:
C03C3/06; C03B19/01; C03B19/14; C03B20/00; G02B1/00; G03F7/00; G21K1/00
Foreign References:
| DE10318935A1 | 2004-11-18 | |||
| EP1125897A1 | 2001-08-22 | |||
| DE10054270A1 | 2002-05-16 | |||
| EP1067097A1 | 2001-01-10 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 22 9 March 2001 (2001-03-09)
ROBERT B. GREEGOR, FARREL W. LYTLE, DONALD R. SANDSTROM, JOE WANG, PETER SCHULTZ: "iNVESTIGATION OF TIO2- SiO2 GLASSES BY x-RAY BASORPTION SPECTROSCOPY", JOURNAL OF NON-CRYSTALLINE SOLIDS, vol. 55, 16 July 1982 (1982-07-16), pages 27 - 43, XP001207851
ROBERT B. GREEGOR, FARREL W. LYTLE, DONALD R. SANDSTROM, JOE WANG, PETER SCHULTZ: "iNVESTIGATION OF TIO2- SiO2 GLASSES BY x-RAY BASORPTION SPECTROSCOPY", JOURNAL OF NON-CRYSTALLINE SOLIDS, vol. 55, 16 July 1982 (1982-07-16), pages 27 - 43, XP001207851
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