Title:
QUARTZ TUBE CLEANING APPARATUS AND CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2023/035642
Kind Code:
A1
Abstract:
A quartz tube cleaning apparatus and a cleaning method. The quartz tube cleaning apparatus comprises an open-bottomed cleaning cover (20), a base (60) movably inserted and assembled with the cleaning cover (20) in a vertical direction, a bearing table (21) disposed in the base (60) and holding a quartz tube (50), and a driving apparatus. A first nozzle (205) is provided at the top of the cleaning cover (20), multiple second nozzles (206) are vertically arranged on a side wall of the cleaning cover (20), the bearing table (21) is vertically provided with an inner spray tube (45), and multiple third nozzles (208) are provided on the top and side of the inner spray tube (45) above the bearing table (21). The base (60) has a rotary sealing apparatus embedded, and the inner spray tube (45) extends continuously along the vertical direction through the bearing table (21) and the rotary sealing apparatus. The driving apparatus drives the bearing table (21) to rotate, and the inner spray tube (45) remains stationary during the rotation of the bearing table (21). The quartz tube cleaning apparatus realizes high-efficiency cleaning operations for various sizes of quartz tubes, can meet the cleaning requirements of quartz tubes having different diameters, simplifies the structure of a quartz tube cleaning device, prolongs the service life of a quartz tube cleaning device, and avoids damage to a quartz tube during cleaning.
Inventors:
HUA BIN (CN)
ZHOU XUNBING (CN)
WAN BANGYONG (CN)
LI WENXUAN (CN)
ZHOU XUNBING (CN)
WAN BANGYONG (CN)
LI WENXUAN (CN)
Application Number:
PCT/CN2022/091639
Publication Date:
March 16, 2023
Filing Date:
May 09, 2022
Export Citation:
Assignee:
ZHICHENG SEMICONDUCTOR EQUIPMENT TECH KUNSHAN CO LTD (CN)
International Classes:
B08B9/28; B08B13/00; F26B21/00
Foreign References:
| CN113500070A | 2021-10-15 | |||
| CN210546830U | 2020-05-19 | |||
| CN213103610U | 2021-05-04 | |||
| CN106824929A | 2017-06-13 | |||
| CN210614566U | 2020-05-26 | |||
| CN101352714A | 2009-01-28 | |||
| CN206509301U | 2017-09-22 | |||
| US20160298235A1 | 2016-10-13 | |||
| KR102033741B1 | 2019-10-18 |
Attorney, Agent or Firm:
NANJING SUGAO PATENT AND TRADEMARK FIRM(ORDINARY PARTNERSHIP) (CN)
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