Title:
QUASI-CW DIODE-PUMPED, SOLID-STATE UV LASER SYSTEM AND METHOD EMPLOYING SAME
Document Type and Number:
WIPO Patent Application WO2002073322
Kind Code:
B1
Abstract:
A quasi-CW diode- or lamp-pumped, A-O Q-switched solid-state UV laser system (10) synchronizes timing of the quasi-CW pumping with movement of the positioning system (36) to reduce pumping while the positioning system (36) is moving from one target area (31) to the next target area (31) to form multiple vias in a substrate at a high throughput. Thus, the available UV power for via formation is higher even though the average pumping power to the laser medium (16), and thermal loading of the laser pumping diodes (14), remains the same as that currently available through conventional CW pumping with conventionally available laser pumping diodes (14). The quasi-CW pumping current profile can be further modified to realize a preferred UV pulse amplitude profile.
Inventors:
SUN YUNLONG (US)
Application Number:
PCT/US2002/007486
Publication Date:
February 20, 2003
Filing Date:
March 12, 2002
Export Citation:
Assignee:
ELECTRO SCIENT IND INC (US)
SUN YUNLONG (US)
HARRIS RICHARD S (US)
SUN YUNLONG (US)
HARRIS RICHARD S (US)
International Classes:
B23K26/00; B23K101/42; H05K3/00; (IPC1-7): G05B15/00; B23K26/00; G06F19/00
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