Title:
RAPID THERMAL PROCESSING EQUIPMENT COOLING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2021/045587
Kind Code:
A1
Abstract:
Disclosed is a rapid thermal processing (RTP) equipment cooling system comprising: a vortex tube for separating compressed air into high-temperature air and low-temperature air and discharging same; a cooling gas supply source for receiving the low-temperature air from the vortex tube and accommodating same; and a cooling unit for cooling the inside of a process chamber, in which RTP is performed, by using the low-temperature air from the cooling gas supply source.
Inventors:
KWON JONG SEOK (KR)
PARK MIN SEOK (KR)
YOON TAE JUN (KR)
PARK MIN SEOK (KR)
YOON TAE JUN (KR)
Application Number:
PCT/KR2020/011999
Publication Date:
March 11, 2021
Filing Date:
September 05, 2020
Export Citation:
Assignee:
NEWYOUNG SYSTEM CO LTD (KR)
International Classes:
H01L21/67; F25B9/04
Foreign References:
| KR101444711B1 | 2014-09-26 | |||
| KR20070017896A | 2007-02-13 | |||
| KR101032043B1 | 2011-05-12 | |||
| KR20170092869A | 2017-08-14 | |||
| KR101509632B1 | 2015-04-08 |
Attorney, Agent or Firm:
MYUNGJANG IP LAW FIRM (KR)
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