Title:
RARE EARTH ROTARY TARGET AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2024/051599
Kind Code:
A1
Abstract:
A rare earth rotary target and a preparation method therefor. The rare earth rotary target comprises a back tube (1) and at least one rare earth target tube (A) welded outside the back tube (1). The back tube (1) and the rare earth target tube (A) are welded by means of an intermediate welding layer. The intermediate welding layer comprises a metal indium solder (3) and an aluminum sheet (2) arranged in the metal indium solder (3), the aluminum content of the intermediate welding layer being 3-10 wt.%. The back tube (1), the aluminum sheet (2) and the rare earth target tube (A) are concentric cylindrical structures. From the aspects of target welding, solder alloying, etc., by means of additionally arranging the aluminum sheet (2) in the middle of the welding layer and combining a thermal treatment process, the melting point of solder is improved, thus achieving the purpose of improving the sputtering power density and a target utilization rate of rare earth rotary targets, realizing low-temperature welding, and slowing down oxidation of rare earth targets.
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Inventors:
CHEN DEHONG (CN)
WANG ZHIQIANG (CN)
ZHONG JIAMIN (CN)
LI ZONGAN (CN)
YANG HONGBO (CN)
ZHANG XIAOWEI (CN)
WU DAOGAO (CN)
PANG SIMING (CN)
ZHANG YANLING (CN)
CHENG JUN (CN)
WANG SHUANG (CN)
XU MINGLEI (CN)
YANG BINGZHENG (CN)
ZHANG XIAOQIANG (CN)
WANG ZHIQIANG (CN)
ZHONG JIAMIN (CN)
LI ZONGAN (CN)
YANG HONGBO (CN)
ZHANG XIAOWEI (CN)
WU DAOGAO (CN)
PANG SIMING (CN)
ZHANG YANLING (CN)
CHENG JUN (CN)
WANG SHUANG (CN)
XU MINGLEI (CN)
YANG BINGZHENG (CN)
ZHANG XIAOQIANG (CN)
Application Number:
PCT/CN2023/116522
Publication Date:
March 14, 2024
Filing Date:
September 01, 2023
Export Citation:
Assignee:
GRIREM ADVANCED MAT CO LTD (CN)
GRIREM HI TECH CO LTD (CN)
GRIREM HI TECH CO LTD (CN)
International Classes:
B23K31/02; B23K9/16; B23K35/26; C23C14/35
Domestic Patent References:
| WO2014058741A1 | 2014-04-17 |
Foreign References:
| CN115533359A | 2022-12-30 | |||
| CN101080508A | 2007-11-28 | |||
| CN114231917A | 2022-03-25 | |||
| CN105803406A | 2016-07-27 | |||
| CN103785911A | 2014-05-14 | |||
| CN113909642A | 2022-01-11 | |||
| US20180051371A1 | 2018-02-22 | |||
| US20120006680A1 | 2012-01-12 |
Attorney, Agent or Firm:
BEIJING CNCLOUD INTELLECTUAL PROPERTY LAW FIRM (CN)
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