Title:
RARE-ERATH-ELEMENT BORIDE MEMBER AND PROCESS FOR PRODUCING THE SAME
Document Type and Number:
WIPO Patent Application WO/2010/001796
Kind Code:
A1
Abstract:
Sintered compacts of rare-earth-element borides, in particular, LaB6, were proved unsuitable for use as a sputtering member or the like because a pollutant is present therein in a large amount. Based on a new view that the contamination by conventional sintered compacts of LaB6 is attributed to the existence of a large amount of pores, an LaB6 compact is pressed in a hot-press furnace and then subjected to HIP. Pores are thus diminished to attain a porosity of 7 vol.% or lower, preferably 1 vol.% or lower. Thus, a member reduced in pollutant content can be formed.
Inventors:
OHMI TADAHIRO (JP)
GOTO TETSUYA (JP)
KONISHI MIKIO (JP)
ANDO KAZUTO (JP)
GOTO TETSUYA (JP)
KONISHI MIKIO (JP)
ANDO KAZUTO (JP)
Application Number:
PCT/JP2009/061572
Publication Date:
January 07, 2010
Filing Date:
June 25, 2009
Export Citation:
Assignee:
UNIV TOHOKU NAT UNIV CORP (JP)
SUMITOMO OSAKA CEMENT CO LTD (JP)
OHMI TADAHIRO (JP)
GOTO TETSUYA (JP)
KONISHI MIKIO (JP)
ANDO KAZUTO (JP)
SUMITOMO OSAKA CEMENT CO LTD (JP)
OHMI TADAHIRO (JP)
GOTO TETSUYA (JP)
KONISHI MIKIO (JP)
ANDO KAZUTO (JP)
International Classes:
C01B35/04; C04B35/50; C04B35/58; H01J61/06
Foreign References:
| JPH06248446A | 1994-09-06 | |||
| JP2001098364A | 2001-04-10 | |||
| JPS63241834A | 1988-10-07 | |||
| JP2005063857A | 2005-03-10 | |||
| JPS6315403A | 1988-01-22 |
Attorney, Agent or Firm:
IKEDA, Noriyasu et al. (JP)
Noriyasu Ikeda (JP)
Noriyasu Ikeda (JP)
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