Title:
RAW MATERIAL SUPPLY SYSTEM
Document Type and Number:
WIPO Patent Application WO/2021/187134
Kind Code:
A1
Abstract:
A raw material supply system according to one embodiment of the present invention comprises: a first reservoir part for retaining therein either a solution obtained by dissolving a first solid raw material in a solvent or a dispersion system obtained by dispersing the first solid raw material in a solvent; a second reservoir part for retaining therein the aforementioned solution or dispersion system transported from the first reservoir part; a detection part for detecting the quantity of the solution or dispersion system retained in the first reservoir part; and a heating part for heating a second solid raw material that is formed by removing the solvent from the solution or dispersion system retained in the second reservoir part.
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Inventors:
KOMORI EIICHI (JP)
Application Number:
PCT/JP2021/008452
Publication Date:
September 23, 2021
Filing Date:
March 04, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
C23C16/448; B01J7/00; C23C16/455
Foreign References:
| JP2004115831A | 2004-04-15 | |||
| JP2004111787A | 2004-04-08 | |||
| JP2007314863A | 2007-12-06 | |||
| JP2005256107A | 2005-09-22 | |||
| JP2016191140A | 2016-11-10 | |||
| JP2005217089A | 2005-08-11 | |||
| JP2015110837A | 2015-06-18 | |||
| JP2008522029A | 2008-06-26 | |||
| JP2006299335A | 2006-11-02 | |||
| JP2008038211A | 2008-02-21 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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