Title:
RAW MATERIAL SUPPLYING DEVICE AND RAW MATERIAL SUPPLYING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/054656
Kind Code:
A1
Abstract:
A raw material supplying device according to one aspect of the present disclosure comprises: a vessel that stores a solution obtained by dissolving a solid raw material in a solvent or a dispersion obtained by dispersing the solid raw material in a dispersion medium; an injection unit that sprays the solution or the dispersion, thus injecting the same into the vessel; and a control unit that controls a spraying condition so that the spraying direction of the solution or the dispersion sprayed from the injection unit changes over time.
Inventors:
KOMORI EIICHI (JP)
Application Number:
PCT/JP2021/032066
Publication Date:
March 17, 2022
Filing Date:
September 01, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
C23C16/448; B01J4/00; B05B12/00; B05B12/02
Foreign References:
| JP2004115831A | 2004-04-15 | |||
| JP2004107729A | 2004-04-08 | |||
| JP2009147356A | 2009-07-02 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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