REACTION CAVITY LINING

WIPO Patent Application WO/2020/098371

A1

Disclosed is a reaction cavity lining comprising an annular side wall (2) and a flange (3) arranged on an upper portion of the side wall (2), wherein an end face of the flange (3) extends out of the side wall (2) in a radial direction, an outer edge of the flange (3) extends in the radial direction to form fixing flanging parts (31), with a hole (32) being provided in each of the fixing flanging parts; the side wall (2) is provided with a rectangular slot (4), the position of which corresponds to that of a robot arm access hole (51) in a side wall of a reaction chamber (50); the side wall (2) is provided with through holes (22) and honeycomb-shaped punctures (21); and a face joined to the bottom of the side wall (2) is provided with a disc (5) extending inwards in the radial direction, an extending end of the disc (5) is fitted with the outer edge of an electrode assembly (80) arranged at the centre of the reaction chamber (50), and multiple circles of slotted holes (6) are annularly arranged on the disc (5). The reaction cavity lining can provide better thermal stability and enough radio frequency grounding lines, so that the downtime is reduced, and the uniformity of a plasma reaction process can be improved.

LI NA (CN)
CHENG SHIRAN (CN)
LIU HAIYANG (CN)
CHEN ZHAOCHAO (CN)
HOU YONGGANG (CN)
WANG CHENGYI (CN)
HU DONGDONG (CN)
XU KAIDONG (CN)

PCT/CN2019/106351

May 22, 2020

September 18, 2019

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JIANGSU LEUVEN INSTR CO LTD (CN)

H01J37/32

WO2015135350A1

2015-09-17

CN208835019U	2019-05-07
CN1333917A	2002-01-30
CN203481181U	2014-03-12
CN101399197A	2009-04-01
CN103891417A	2014-06-25
CN201584396U	2010-09-15

NANJING JINGWEI PATENT & TRADEMARK AGENCY CO., LTD (CN)

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