Title:
REINFORCED PELLICLE FILM AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2020/008978
Kind Code:
A1
Abstract:
The objective of the present invention is to provide a reinforced pellicle film that suppresses the generation of outgas, has high heat resistance and durability, and has excellent EUV transmissivity. A reinforced pellicle film characterized by comprising a pellicle film constituted from a carbon film, and a support material layer formed on one or both surfaces of the pellicle film and having a plurality of openings, the pellicle film and the support material layer comprising the same carbon material.
Inventors:
KAWASHIMA YUKI (JP)
Application Number:
PCT/JP2019/025424
Publication Date:
January 09, 2020
Filing Date:
June 26, 2019
Export Citation:
Assignee:
KANEKA CORP (JP)
International Classes:
G03F1/62
Foreign References:
| JP2015018228A | 2015-01-29 | |||
| JP2018092155A | 2018-06-14 | |||
| US20170038675A1 | 2017-02-09 |
Attorney, Agent or Firm:
USFI PATENT ATTORNEYS INTERNATIONAL OFFICE (JP)
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