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Title:
REMOTE ACCESS GATEWAY FOR SEMICONDUCTOR PROCESSING EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2010/048379
Kind Code:
A3
Abstract:
An apparatus for providing an interface for semiconductor processing equipment is disclosed. In some embodiments, an apparatus for providing an interface for semiconductor processing equipment having an interface card includes a display logic subsystem to provide an interface to one or more devices such as video and information displays, light pens, keyboards, computer mice, and warning light networks and alarms via a data and control bus; a bridge to provide access to the data and control bus; and a local computer subsystem coupled to the bridge and the display logic subsystem, wherein the local computer subsystem provides access to one or more remote devices.

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Inventors:
SCHAUER RONALD VERN (US)
Application Number:
PCT/US2009/061630
Publication Date:
July 15, 2010
Filing Date:
October 22, 2009
Export Citation:
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Assignee:
APPLIED MATERIALS INC (US)
SCHAUER RONALD VERN (US)
International Classes:
H01L21/00; G06F3/01; H01L21/02
Foreign References:
US20040034439A12004-02-19
KR20040088633A2004-10-20
KR20000052117A2000-08-16
KR20060064095A2006-06-13
Attorney, Agent or Firm:
TABOADA, Alan (1030 Broad Street 2nd Floo, Shrewsbury NJ, US)
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