Title:
REMOVAL PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/192837
Kind Code:
A1
Abstract:
This removal processing device has a table, a plurality of chucks, a nozzle, and a table cover. The table is positioned horizontally, and rotates around a vertical rotational center axis. The plurality of chucks are positioned at intervals around the rotational center axis of the table. The nozzle supplies a processing liquid to a substrate that is retained by a chuck. The table cover receives the processing liquid, above the table. The table cover has a conical sloped section, in which the height becomes lower in accordance with the distance from the rotational center axis of the table and the height is constant in the table rotation direction.
Inventors:
SAKAMOTO TAKAHIRO (JP)
KODAMA MUNEHISA (JP)
KODAMA MUNEHISA (JP)
Application Number:
PCT/JP2021/007824
Publication Date:
September 30, 2021
Filing Date:
March 02, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
B23Q11/00; B24B55/06; B24B7/00; B24B7/04; B24B41/06; B24B55/00; B24B55/02; H01L21/304
Foreign References:
| JP2013188813A | 2013-09-26 | |||
| JP2018027593A | 2018-02-22 | |||
| JP2004079749A | 2004-03-11 | |||
| JP2010247282A | 2010-11-04 | |||
| JP2015036162A | 2015-02-23 | |||
| JP2019058995A | 2019-04-18 | |||
| JP2019212838A | 2019-12-12 | |||
| JP2013255952A | 2013-12-26 | |||
| JP2007229904A | 2007-09-13 | |||
| JPH11114765A | 1999-04-27 | |||
| JPH02268432A | 1990-11-02 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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