Title:
RESIN CONTAINER COATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/073609
Kind Code:
A1
Abstract:
This resin coating device is provided with: multiple chambers (40A, 40B, 40C, 40D) for housing each of multiple resin containers (B) separately; multiple internal electrodes (50) on the inner circumference of which a gas conduction section (51), into which raw material gas is guided, is formed and which are respectively inserted inside the multiple resin containers (B) housed in the chambers; a gas supply unit (70) for supplying raw material gas to the multiple chambers (40A, 40B, 40C, 40D); a high frequency power source (80) for supplying high frequency electrical power to the multiple chambers (40A, 40B, 40C, 40D); and an electric power-switching unit (85) capable of switching the supply destination for the high frequency electrical power supplied from the high frequency power source (80) from the first and second chambers (40A, 40B), which configure a first unit (U1), to the third and fourth chambers (40C, 40D), which configure a second unit (U2).
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Inventors:
SHIMADA KIYONORI (JP)
Application Number:
PCT/JP2013/080124
Publication Date:
May 15, 2014
Filing Date:
November 07, 2013
Export Citation:
Assignee:
NISSEI ASB MACHINE CO LTD (JP)
International Classes:
C23C16/509; B65D23/02
Foreign References:
| JP2007016300A | 2007-01-25 | |||
| JP2788412B2 | 1998-08-20 | |||
| JP2005350145A | 2005-12-22 | |||
| JP2788412B2 | 1998-08-20 | |||
| JP4567442B2 | 2010-10-20 |
Other References:
See also references of EP 2918703A4
Attorney, Agent or Firm:
Shin-Ei Patent Firm, P. C. (JP)
Patent business corporation Shin-Ei Patent Firm (JP)
Patent business corporation Shin-Ei Patent Firm (JP)
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