Title:
RESIST UNDERLAYER FILM-FORMING COMPOSITION COMPRISING AMIDE GROUP-CONTAINING POLYESTER
Document Type and Number:
WIPO Patent Application WO/2018/070303
Kind Code:
A1
Abstract:
Provided is a resist underlayer film-forming composition which is capable of providing a resist underlayer film, said resist underlayer film exerting a sufficient anti-reflection function particularly in a KrF process, a high solvent resistance and a high dry etching speed, and enables the formation of a photoresist pattern having a good cross-sectional shape. The resist underlayer film-forming composition comprises a copolymer which contains: structural unit (A) derived from a diepoxy compound; and structural unit (B) derived from a compound represented by formula (1) [wherein: A represents a benzene ring or a cyclohexane ring; X represents a hydrogen atom, an alkyl or alkoxy group having 1 to 10 carbon atoms and optionally substituted by a halogen atom, or an alkoxycarbonyl group having 2 to 11 carbon atoms; and Y represents -COOH or -L-NHCO-Z-COOH (wherein: Z represents an alkylene group having 3 to 10 carbon atoms and optionally substituted by an oxygen atom, a sulfur atom or a nitrogen atom; and L represents a single bond or a spacer)].
Inventors:
TAMURA MAMORU (JP)
OGATA HIROTO (JP)
USUI YUKI (JP)
KISHIOKA TAKAHIRO (JP)
OGATA HIROTO (JP)
USUI YUKI (JP)
KISHIOKA TAKAHIRO (JP)
Application Number:
PCT/JP2017/035967
Publication Date:
April 19, 2018
Filing Date:
October 03, 2017
Export Citation:
Assignee:
NISSAN CHEMICAL IND LTD (JP)
International Classes:
C07C233/43; C07C233/54; C07C235/16; C07C317/40; C08G59/52; G03F7/11; G03F7/20
Domestic Patent References:
| WO2012036523A2 | 2012-03-22 | |||
| WO2015019961A1 | 2015-02-12 |
Foreign References:
| US20070099970A1 | 2007-05-03 | |||
| US2520293A | 1950-08-29 | |||
| US2399600A | 1946-04-30 | |||
| JP2002258447A | 2002-09-11 |
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DATABASE CAS [o] 2011, retrieved from STN Database accession no. 1293095-68-7
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DATABASE CAS [o] 2006, retrieved from STN Database accession no. 904790-50-7
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DATABASE CAS [o] 4 September 2016 (2016-09-04), retrieved from STN Database accession no. 1986111-78-7
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DATABASE CAS [o] 2006, retrieved from STN Database accession no. 892222-10-5
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 892228-84-1
DATABASE CAS [o] 2004, retrieved from STN Database accession no. 692272-94-9
DATABASE CAS [o] 2004, retrieved from STN Database accession no. 690992-13-3
DATABASE CAS [o] 2009, retrieved from STN Database accession no. 1184538-74-6
DATABASE CAS [o] 2009, retrieved from STN Database accession no. 1183810-24-3
DATABASE CAS [o] 2009, retrieved from STN Database accession no. 1179134-02-1
DATABASE CAS [o] 2009, retrieved from STN Database accession no. 1178100-86-1
DATABASE CA S [o] 2006, retrieved from STN Database accession no. 900085-03-2
DATABASE CAS [o] 2013, retrieved from STN Database accession no. 1497075-30-5
DATABASE CAS [o] 2004, retrieved from STN Database accession no. 693776-74-8
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 894518-30-0
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 900096-21-1
DATABASE CAS [o] 2002, retrieved from STN Database accession no. 459183-87-0
DATABASE CAS [o] 2001, retrieved from STN Database accession no. 332886-00-7
DATABASE CAS [o] 2000, retrieved from STN Database accession no. 303194-96-9
DATABASE CAS [o] 2004, retrieved from STN Database accession no. 701253-49-8
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 882321-98-4
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 884804-51-7
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 885567-55-5
DATABASE CAS [o] 2008, retrieved from STN Database accession no. 1022717-75-4
GUPTA, L. ET AL.: "Thorium(IV) complexes of various 2'-carboxyanilic acids", ASIAN JOURNAL OF CHEMISTRY, vol. 15, no. 3, 2003, pages 1467 - 1472, ISSN: 0970-7077
JIANG, H. L. ET AL.: "Synthesis and characterization of new biodegradable fluorescing poly (amide-anhydrides", POLYMER INTERNATIONAL, vol. 50, no. 6, 2001, pages 722 - 727, XP055541349, ISSN: 0959-8103
AL-NUZAL, S. M. ET AL.: "Synthesis of multidentate ligands with amido or amino donor groups for the preparation of rhenium and technetium radiopharmaceuticals", JOURNAL OF RADIOANALYTICAL AND NUCLEAR CHEMISTRY, vol. 295, no. 3, 2013, pages 1599 - 1604, XP055541353, ISSN: 0236-5731
STASKUN, B.: "Azepino [1,2-a] indole synthesis from a 1,2,3,4-tetrahydro-9(10H)-acridinone and sodium dichloroisocyanurate or singlet oxygen", JOURNAL OF ORGANIC CHEMISTRY, vol. 53, no. 22, 1988, pages 5287 - 5291, XP055541359, ISSN: 0022-3263
BARKER, D. ET AL.: "A convenient synthesis of 2-(3-methyl-2, 5-dioxopyrrolidin-1-yl) benzoic acid", SYNTHESIS, 2003, pages 656 - 658, ISSN: 0039-7881
DELIWALA, C. V. ET AL.: "Chemotherapy of tuberculosis. I. synthesis of possible lipophilic chemotherapeuticals of the sulfonamide and sulfone series derived from fatty acids, including those of the chaulmoogra group", PROCEEDINGS- INDIAN ACADEMY OF SCIENCES, SECTION A, vol. 31 A, 1950, pages 21 - 5, ISSN: 0370-0089
GRAY, W. H. ET AL.: "Carboxylic acid derivatives of 4,4'-diaminodiphenyl sulfone", JOURNAL OF THE CHEMICAL SOCIETY, 1942, pages 42 - 45, ISSN: 0368-1769
IORDANOV, S.: "Preparation and properties of poly (vinyliodoacetates), crosslinked by bridging groups of various lengths and flexibility", DOKLADY BOLGARSKOI AKADEMII NAUK, vol. 33, no. 8, 1980, pages 1081 - 4, ISSN: 0366-8681
IORDANOV, S. ET AL.: "Synthesis of long-chain w-dicarboxylic compounds as crosslinking reagents of polyvinyl iodoacetate", DOKLADY BOLGARSKOI AKADEMII NAUK, vol. 33, no. 5, 1980, pages 639 - 41, ISSN: 0366-8681
LEE, S. J. ET AL.: "Self-assembled supramolecular architecture based on an achiral bolaamphiphilic diacid in binary system", BULLETIN OF THE KOREAN CHEMICAL SOCIETY, vol. 28, no. 5, 2007, pages 867 - 870, XP055544547, ISSN: 0253-2964
LOMBARDINO, J. G. ET AL.: "The reaction of o-phenylenediamine with 3-methylglutaric anhydride", JOURNAL OF HETEROCYCLIC CHEMISTRY, vol. 19, no. 4, 1982, pages 923 - 924, XP055544549, ISSN: 0022-152X
HAHN, G. E. ET AL.: "Oligoamides from dodecanedioic acid and 4,4'-methylenedicyclohexylamine. (Oligoamides of the ''Qiana'' type", MAKROMOLEKULARE CHEMIE, vol. 186, no. 2, 1985, pages 297 - 316, ISSN: 0025-116X
LI, R. ET AL.: "Control the handedness of the mesoporous silica nanoribbons and the pore channels using anionic gelators", MATERIALS LETTERS, vol. 98, 2013, pages 8 - 11, XP055544552, ISSN: 0167-577X
DATABASE CAS [o] 2004, retrieved from STN Database accession no. 690990-09-1
DATABASE CAS [o] 2005, retrieved from STN Database accession no. 826998-55-4
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 890957-38-7
DATABASE CAS [o] 2015, retrieved from STN Database accession no. 1789783-26-1
DATABASE CAS [o] 2009, retrieved from STN Database accession no. 1183466-35-4
DATABASE CAS [o] 2015, retrieved from STN Database accession no. 1789035-17-1
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 885569-34-6
DATABASE CAS [o] 2009, retrieved from STN Database accession no. 1176693-64-3
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 895764-43-9
DATABASE CAS [o] 2004, retrieved from STN Database accession no. 685115-89-3
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 904790-57-4
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 904812-13-1
DATABASE CAS [o] 2011, retrieved from STN Database accession no. 1291471-52-7
DATABASE CAS [o] 2011, retrieved from STN Database accession no. 1292462-80-6
DATABASE CAS [o] 2011, retrieved from STN Database accession no. 1293095-68-7
DATABASE CAS [o] 2004, retrieved from STN Database accession no. 685115-85-9
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 904790-50-7
DATABASE CAS [o] 8 September 2016 (2016-09-08), retrieved from STN Database accession no. 1989339-42-5
DATABASE CAS [o] 4 September 2016 (2016-09-04), retrieved from STN Database accession no. 1986111-78-7
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 892222-04-7
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 892222-10-5
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 892228-84-1
DATABASE CAS [o] 2004, retrieved from STN Database accession no. 692272-94-9
DATABASE CAS [o] 2004, retrieved from STN Database accession no. 690992-13-3
DATABASE CAS [o] 2009, retrieved from STN Database accession no. 1184538-74-6
DATABASE CAS [o] 2009, retrieved from STN Database accession no. 1183810-24-3
DATABASE CAS [o] 2009, retrieved from STN Database accession no. 1179134-02-1
DATABASE CAS [o] 2009, retrieved from STN Database accession no. 1178100-86-1
DATABASE CA S [o] 2006, retrieved from STN Database accession no. 900085-03-2
DATABASE CAS [o] 2013, retrieved from STN Database accession no. 1497075-30-5
DATABASE CAS [o] 2004, retrieved from STN Database accession no. 693776-74-8
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 894518-30-0
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 900096-21-1
DATABASE CAS [o] 2002, retrieved from STN Database accession no. 459183-87-0
DATABASE CAS [o] 2001, retrieved from STN Database accession no. 332886-00-7
DATABASE CAS [o] 2000, retrieved from STN Database accession no. 303194-96-9
DATABASE CAS [o] 2004, retrieved from STN Database accession no. 701253-49-8
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 882321-98-4
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 884804-51-7
DATABASE CAS [o] 2006, retrieved from STN Database accession no. 885567-55-5
DATABASE CAS [o] 2008, retrieved from STN Database accession no. 1022717-75-4
Attorney, Agent or Firm:
TSUKUNI & ASSOCIATES et al. (JP)
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