Title:
RESONATOR, RESONATOR ASSEMBLY, FILTER, ELECTRONIC DEVICE, AND MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2024/066021
Kind Code:
A1
Abstract:
The present application provides a resonator, a resonator assembly, a filter, an electronic device, and a manufacturing method. The resonator comprises: a substrate, provided with a first surface and a second surface which are opposite to each other; a first electrode located on the first surface, wherein the first electrode comprises a first protruding part protruding out of the first surface and a first flat part located on the first surface, and a cavity is formed between the first protruding part and the first surface; a piezoelectric layer, located on the side of the first electrode away from the substrate, wherein the piezoelectric layer is parallel to the first surface; and a second electrode, located on the side of the piezoelectric layer away from the first electrode. Because the piezoelectric layer is parallel to the first surface, the stress change amplitude of the whole piezoelectric layer is small, so that the consistency of piezoelectric performance of the piezoelectric layer is ensured; in addition, because deformation of the piezoelectric layer is small, the mechanical structure is stable, and then it is not prone to breakage in case of outside impact.
Inventors:
LI LINPING (CN)
Application Number:
PCT/CN2022/135593
Publication Date:
April 04, 2024
Filing Date:
November 30, 2022
Export Citation:
Assignee:
JWL ZHEJIANG SEMICONDUCTOR CO LTD (CN)
International Classes:
H03H9/02; H03H9/54
Domestic Patent References:
| WO2022131309A1 | 2022-06-23 |
Foreign References:
| CN106660074A | 2017-05-10 | |||
| CN115051679A | 2022-09-13 | |||
| CN114884482A | 2022-08-09 | |||
| CN114006602A | 2022-02-01 | |||
| CN202211230473A | 2022-09-30 |
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW CO., LTD. (CN)
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