Title:
RESONATOR AND RESONANCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/105845
Kind Code:
A1
Abstract:
A vibration unit (110) comprises a first part (111) that is a partial area of a main surface of a substrate (50) in a plan view, and a second part (112) that is another area of the main surface of the substrate (50) in the plan view. The thickness of the second part (112) in a thickness direction intersecting the main surface of the substrate (50) is greater than the thickness of the first part (111) in the thickness direction. The side of the vibration part (110) opposite a piezoelectric layer (F3) in the substrate (50) is formed in a recessed shape or a protruding shape by the first part (111) and the second part (112).
Inventors:
HIGUCHI YOSHIYUKI (JP)
FUKUMITSU MASAKAZU (JP)
FUKUMITSU MASAKAZU (JP)
Application Number:
PCT/JP2022/029124
Publication Date:
June 15, 2023
Filing Date:
July 28, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/24
Domestic Patent References:
| WO2020213210A1 | 2020-10-22 | |||
| WO2019008830A1 | 2019-01-10 | |||
| WO2016063863A1 | 2016-04-28 |
Foreign References:
| JP2021513774A | 2021-05-27 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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