Title:
RESONATOR OF WHICH GAP STRUCTURE IS PROVIDED ON INNER SIDE OF PROJECTION STRUCTURE, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/238296
Kind Code:
A1
Abstract:
A bulk acoustic resonator, comprising a substrate (10), an acoustic mirror (20), a bottom electrode (30) provided above the substrate (10), a top electrode (50) which is opposite the bottom electrode (30) and has an electrode connection portion, and a piezoelectric layer (40) provided above the bottom electrode (30) and between the bottom electrode (30) and the top electrode (50). A projection structure (51) and a gap structure which is located at an inner side of the projection structure (51) and forms a gap are provided at an edge of the top electrode (50). A filter having the bulk acoustic resonator, and an electronic device having the filter can reduce clutter generation in the resonator while suppressing energy leakage of the resonator.
Inventors:
ZHANG MENGLUN (CN)
PANG WEI (CN)
YANG QINGRUI (CN)
PANG WEI (CN)
YANG QINGRUI (CN)
Application Number:
PCT/CN2020/076214
Publication Date:
December 03, 2020
Filing Date:
February 21, 2020
Export Citation:
Assignee:
UNIV TIANJIN (CN)
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/54; H03H9/02; H03H9/205
Domestic Patent References:
| WO2019029912A1 | 2019-02-14 |
Foreign References:
| US20150349747A1 | 2015-12-03 | |||
| CN101931380A | 2010-12-29 | |||
| CN107528565A | 2017-12-29 |
Attorney, Agent or Firm:
BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)
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