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Title:
RETAINER RING FOR CARRIER HEAD FOR CHEMICAL POLISHING APPARATUS AND CARRIER HEAD COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2016/093504
Kind Code:
A1
Abstract:
Provided is a retainer ring for a carrier head for a chemical polishing apparatus, the retainer ring comprising: a first retainer ring member which comes in contact with the outer lateral side of a wafer; a second retainer ring member which is provided on the outer side and the upper part of the retainer ring member and does not come in contact with the outer lateral side of the wafer; and a pressure reducing means which is for reducing pressure transmitted from the upper part of the first retainer ring member to the second retainer ring member.

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Inventors:
YOO HYUN JEONG (KR)
Application Number:
PCT/KR2015/012336
Publication Date:
June 16, 2016
Filing Date:
November 17, 2015
Export Citation:
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Assignee:
YOO HYUN JEONG (KR)
International Classes:
H01L21/304; B24B37/32; H01L21/67
Foreign References:
US8628378B22014-01-14
JP2004276128A2004-10-07
KR100652315B12006-11-30
JP2006253560A2006-09-21
JP2002079459A2002-03-19
Attorney, Agent or Firm:
DAHAI INTERNATIONAL PATENT & LAW FIRM (KR)
특허법인 다해 (KR)
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