Title:
RINSING MACHINE SWINGING SPRAYING DEVICE AND METHOD
Document Type and Number:
WIPO Patent Application WO/2014/089942
Kind Code:
A1
Abstract:
Disclosed are a rinsing machine swinging spraying device and a method for rinsing a wafer. The rinsing machine swinging spraying device comprises a spraying arm (1), a spraying head (2) and a driving apparatus, wherein the spraying head (2) is hinged to the spraying arm (1) to form a first hinging point (5), and the spraying head (2) swings under the control of the driving apparatus. The driving apparatus is an air cylinder (3), and a piston rod (4) of the air cylinder (3) is hinged to the spraying head (2) to form a second hinging point (6). The rinsing machine swinging spraying device and the method enable both the central position and the edge position of the wafer to have good rinsing effects.
Inventors:
SHI YANHUI (CN)
WU YI (CN)
WU YI (CN)
Application Number:
PCT/CN2013/073580
Publication Date:
June 19, 2014
Filing Date:
April 01, 2013
Export Citation:
Assignee:
BEIJING SEVENSTAR ELECTRONICS CO LTD (CN)
International Classes:
B08B3/02; B08B13/00
Foreign References:
| CN203002676U | 2013-06-19 | |||
| CN101797714A | 2010-08-11 | |||
| JP2004363453A | 2004-12-24 | |||
| CN101459047A | 2009-06-17 | |||
| US6643882B1 | 2003-11-11 | |||
| CN201482749U | 2010-05-26 | |||
| JPS5544780A | 1980-03-29 | |||
| US20080041430A1 | 2008-02-21 | |||
| CN102059230A | 2011-05-18 |
Attorney, Agent or Firm:
CN-KNOWHOW INTELLECTUAL PROPERTY AGENT LIMITED (CN)
北京路浩知识产权代理有限公司 (CN)
北京路浩知识产权代理有限公司 (CN)
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