Title:
ROBOT CONTROL DEVICE, ROBOT, AND ROBOT CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2021/029168
Kind Code:
A1
Abstract:
The present invention is a robot control device for controlling the operation of a robot that holds and conveys a substrate, the robot control device being characterized in that: when an end effector is positioned at a first teaching point, the first teaching point being above a placement position, a first state is achieved in which the end effector is holding the substrate and the substrate is not placed in the placement position; when the end effector is positioned at a second teaching point, the second teaching point being below the placement position, a second state is achieved in which the end effector is not holding the substrate and the substrate is placed in the placement position; the first state and the second state can be switched by causing the robot to perform a first operation in which the end effector moves from either of the first and second teaching points to the other of the first and second teaching points; and midway through the first operation, the end effector does not make a determination as to whether the end effector has passed through the placement position, and thus the end effector is not stopped.
Inventors:
YOSHIDA MASAYA
KITANO SHINYA
NAKAYA ATSUSHI
SUGAHARA JUNICHI
KITANO SHINYA
NAKAYA ATSUSHI
SUGAHARA JUNICHI
Application Number:
PCT/JP2020/026871
Publication Date:
February 18, 2021
Filing Date:
July 09, 2020
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
B25J13/00; H01L21/677
Foreign References:
| JP2009529248A | 2009-08-13 | |||
| JP2008227199A | 2008-09-25 | |||
| JP2005310858A | 2005-11-04 | |||
| JP2009090406A | 2009-04-30 | |||
| JP2017505994A | 2017-02-23 | |||
| JP2004207279A | 2004-07-22 |
Attorney, Agent or Firm:
PATENT CORPORATE BODY ARCO PATENT OFFICE (JP)
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