Title:
ROBOT AND SUBSTRATE POSTURE EXAMINING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/050201
Kind Code:
A1
Abstract:
Provided is a robot for transferring a substrate, the robot comprising a hand section, an arm section, a substrate detecting section, and a substrate posture examining section. The hand section holds and transfers the substrate. The arm section is coupled with the hand section to move the hand section. The substrate detecting section detects the presence or absence of the substrate in a contactless manner. The substrate posture examining section examines the posture of the substrate on the basis of the height at which the substrate in a state of not being held by the hand section is detected by the substrate detecting section.
Inventors:
SHIMIZU IPPEI
OKADA HIROYUKI
OKADA HIROYUKI
Application Number:
PCT/JP2021/031627
Publication Date:
March 10, 2022
Filing Date:
August 29, 2021
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
H01L21/677
Foreign References:
| JPH07153818A | 1995-06-16 | |||
| JP2020053416A | 2020-04-02 | |||
| JP2019149478A | 2019-09-05 |
Attorney, Agent or Firm:
KATSURAGAWA, Naoki (JP)
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