Title:
ROBOT, AND SUBSTRATE TRANSPORTATION SYSTEM COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2021/157553
Kind Code:
A1
Abstract:
A robot 100 comprising a base 1 that has a plurality of side parts, an arm 3 that is rotatably linked to the base 1, and a hand 8 that is linked to the arm 3. The portion at which the arm 3 and the base 1 are linked is positioned so as to be nearest to a first side part 11a in plan view. The base 1 accommodates control components. A maintenance part 12, on which maintenance components such as a first board 24 are positioned and which is for performing maintenance on the maintenance components, is provided to a second side part 11b.
Inventors:
MATSUOKA JUNICHI
YAMASAKI MASARU
TANAKA YUICHIRO
YAMASAKI MASARU
TANAKA YUICHIRO
Application Number:
PCT/JP2021/003670
Publication Date:
August 12, 2021
Filing Date:
February 02, 2021
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
B25J9/06; H01L21/677
Foreign References:
| JP2020011303A | 2020-01-23 | |||
| JP2019140379A | 2019-08-22 | |||
| JP2011189415A | 2011-09-29 | |||
| JP5937249B1 | 2016-06-22 | |||
| JP2013171983A | 2013-09-02 | |||
| JP2017183708A | 2017-10-05 | |||
| JP2018088339A | 2018-06-07 |
Attorney, Agent or Firm:
TERAZONO Kenichi et al. (JP)
Download PDF:
Previous Patent: HORIZONTAL ARTICULATED ROBOT AND SUBSTRATE TRANSFER SYSTEM COMPRISING SAME
Next Patent: OPTICAL APPARATUS
Next Patent: OPTICAL APPARATUS